Performance Study of Aerostatic Bearings with Arrayed Microhole Restrictors
Micro-vibration of aerostatic bearings has been the bottleneck in the improvement of the moving and positioning accuracy of ultra-precision fabrication and metrology equipments. In this study, a new type of aerostatic bearing restrictor has been proposed. The prototype of arrayed microhole restrictor, instead of the conventional single hole restrictor was developed with the aim of reducing the harmful micro-vibration of aerostatic bearings. Computational fluid dynamics (CFD) was employed to numerically calculate the air flow field. It is found that the employment of arrayed microhole restrictors can reduce the amount of micro-vibration while maintain the load carrying capacity and stiffness of the aerostatic bearing. Experimental measurement of the micro-vibration confirms the effectiveness of this new type of restrictor.
P. Li et al., "Performance Study of Aerostatic Bearings with Arrayed Microhole Restrictors", Advanced Materials Research, Vols. 311-313, pp. 386-391, 2011