Effect of Structure on the Performance of Electrostatic MEMS Actuator


Article Preview

Four types of MEMS actuators are presented in this paper. The effect of structure on three major performance parameters of these actuators, such as resonance frequency, pull in voltage and stroke, are studied by FEA and compared with each other. The result shows that, on the condition of the same spring length and the same spring width , O-shape actuator have the largest stroke and pull in voltage, but that of L-shape actuator is the smallest.



Advanced Materials Research (Volumes 317-319)

Edited by:

Xin Chen






F. R. Hu et al., "Effect of Structure on the Performance of Electrostatic MEMS Actuator", Advanced Materials Research, Vols. 317-319, pp. 1627-1630, 2011

Online since:

August 2011




[1] M.C. Wu, Micromachining for optical and optoelectronic systems, Proc. IEEE 85 (11) (1997) 1833–1856.

[2] R. Zengerle, J. Ulrich, S. Kluge, M. Richter, A. Richter, A bidirectional silicon micropump, Sens. Actuators A 50 (1995) 81–86.

DOI: 10.1016/0924-4247(96)80088-4

[3] P.F. Van Kessel, L.J. Hornbeck, R.E. Meier, M.R. Douglass, A MEMS based projection display, Proc. IEEE 86 (8) (1998) 1687–1704.

DOI: 10.1109/5.704274

[4] Fangrong Hu, Jun Yao, A MEMS micromirror driven by electrostatic force [J].J. of electrostatic, 2010. 68(3): 237-242.

DOI: 10.1016/j.elstat.2010.01.005

In order to see related information, you need to Login.