Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer
A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA employs a levitated perforated plate as its proof mass. Three main purposes are considered for the design of the perforated proof mass: (1) reducing squeeze-film effect; (2) improving the dynamic response of MESA; (3) facilitating the etching of sacrificial layer under the plate. This paper utilized a finite element model for evaluating air squeeze film damping effect of perforated proof mass. Among several designs of perforated proof mass, the best choice was found. Besides, a system-level model created in CoventorWare is used to evaluate the effect of squeeze film damping and the dynamic response of the MESA.
Z. Wan et al., "Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer", Advanced Materials Research, Vols. 317-319, pp. 1631-1634, 2011