Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer

Abstract:

Article Preview

A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA employs a levitated perforated plate as its proof mass. Three main purposes are considered for the design of the perforated proof mass: (1) reducing squeeze-film effect; (2) improving the dynamic response of MESA; (3) facilitating the etching of sacrificial layer under the plate. This paper utilized a finite element model for evaluating air squeeze film damping effect of perforated proof mass. Among several designs of perforated proof mass, the best choice was found. Besides, a system-level model created in CoventorWare is used to evaluate the effect of squeeze film damping and the dynamic response of the MESA.

Info:

Periodical:

Advanced Materials Research (Volumes 317-319)

Edited by:

Xin Chen

Pages:

1631-1634

DOI:

10.4028/www.scientific.net/AMR.317-319.1631

Citation:

Z. Wan et al., "Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer", Advanced Materials Research, Vols. 317-319, pp. 1631-1634, 2011

Online since:

August 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.