A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam

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In this paper, differential capacitors sandwiched structure of a high-G capacitive microaccelerometer with round metal proof mass supported by multi-beam and its characteristic are presented. The operation principle and built-in self-calibration and self-test functions are described. The fabrication process and the fabricated chip of the microaccelerometer based on UV-LIGA technology are reported. The detection and closed-loop control circuits of the microaccelerometer are designed and calibrated. The range of the detection channel is ±6pF, the sensitivity is 89.3mV/pF, and the linearity is 2.59%.

Info:

Periodical:

Advanced Materials Research (Volumes 317-319)

Edited by:

Xin Chen

Pages:

1843-1846

Citation:

Y. K. Zhang et al., "A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam", Advanced Materials Research, Vols. 317-319, pp. 1843-1846, 2011

Online since:

August 2011

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$38.00

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DOI: https://doi.org/10.4028/www.scientific.net/amr.97-101.2538