Advances in Abrasive Technology XIV

Volume 325

doi: 10.4028/

Paper Title Page

Authors: Wu Sheng Luo, Cheng Yong Wang, Jun Wang, Yue Xian Song

Abstract: Abrasive jets can be used for polishing when fine slurry is used. This paper presents a model for the jet formation process, CFD simulations...

Authors: Mikinori Nagano, Fumiya Yamaga, Kenta Yamasaki, Nobuyuki Zettsu, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama, Kazuya Yamamura

Abstract: The aspherical supermirror is among the most useful optics for focusing a neutron beam with a wide wavelength range. The improvement in...

Authors: Peng Yao, Takeshi Matsuda, Tian Feng Zhou, Ji Wang Yan, Tunemoto Kuriyagawa, Ya Dong Gong

Abstract: On-machine measurement and statistical analysis of wheel topography are important for real-time monitoring the wheel condition during...

Authors: Christof Landesberger, Christoph Paschke, Karlheinz Bock

Abstract: We investigated the influence of various backside thinning techniques on the fracture strength of thinned single crystalline silicon wafers...

Authors: Alexey Ivanov, Ulrich Mescheder

Abstract: In this paper the process of silicon anodization as a structuring technique is discussed. 3D-structuring is achieved by 3D control of...

Authors: Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Li Bo Zhou

Abstract: The optical microgauge system by means of near-infrared spectroscopic measurements was proposed as the thickness monitoring tool in the...

Authors: Yuki Mikami, Li Bo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya

Abstract: In recent semiconductor industry, production of ever flatter, thinner and larger Si wafer are required to fulfill the demands in high...


Abstract: The papers has been removed as the papers has been commercially missused and is in fact being exploited in the commercial arena.

Authors: Md. Mamunur Rashid, A.M.M. Sharif Ullah, Junichi Tamaki, Akihiko Kubo

Abstract: Hard materials based on Alumina (AN), Silicon Carbide (SC), Boron Carbide/Nitride (BC/N), Zirconia (ZN), and alike are often used to produce...

Authors: Naohiro Nishikawa, Yoshimi Sato, T. Kato, K. Karita, Y. Hagihara, Nobuhito Yoshihara, H. Okawai, H. Kato, Toshirou Iyama, Masahiro Mizuno, Shinya Tsukamoto

Abstract: Currently, the machining fluid includes several chemicals such as cutting oil and grinding oil is used for the machining. However, such the...


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