Advances in Abrasive Technology XIV

Volume 325

doi: 10.4028/

Paper Title Page

Authors: Shigeomi Koshimizu

Abstract: Glass disks are used as substrates for the recording media in magnetic disk devices. To mass produce glass disks, a technology is required...

Authors: Hiro Ohzeki, Fumihito Arai

Abstract: This paper deals with drilling of borosilicate glass with feedback control based on cutting force, in order to provide a basis for...

Authors: X.L. Jin, Liang Chi Zhang

Abstract: This paper develops a statistical model to analyze the chemical effect on the material removal rate (MRR) in chemo-mechanical polishing of...

Authors: Shang Gao, Ren Ke Kang, Zhu Ji Jin, Zhi Gang Dong

Abstract: Aiming at the problems such as metal ionic contamination, poor dispersion property and low material removal rate (MRR) in the chemical...

Authors: Zhu Ji Jin, Z.W. Yuan, Q. Li, K. Wang

Abstract: Mechanical energy may initiate and accelerate chemical reaction in chemical mechanical polishing (CMP). To study the effect of mechanical...

Authors: Sze Keat Chee, Hirofumi Suzuki, Mutsumi Okada, Takeshi Yano, Toshiro Higuchi, Wei Min Lin

Abstract: Demands of precision molds with complicated microstructures for digital devices such as DVD pick-up system, medical devices such as μ-TAS...

Authors: Urara Satake, Wen Xiao Wang, Toshiyuki Enomoto, Norikazu Tabata

Abstract: Demand for diminishing edge roll off of workpiece has rapidly increased, especially in polishing silicon wafers and glass disks. However,...

Authors: Keisuke Igarashi, Masayuki Sato, Yasuhiro Kakinuma

Abstract: Viscoelastic polymer with high scratch resistance has been developed for coating material of product. Due to some particular characteristics...

Authors: Takeshi Tanaka

Abstract: The main purposes of this study were to lessen the deformities in the machined surface, to make the crystal grains on the machined surface...

Authors: Jason Sowers, Alex Fang

Abstract: Researching the effect that certain parameters have on the lapping process is crucial to understanding the fundamental material removal...


Showing 71 to 80 of 118 Paper Titles