The Development of a Three Dimensional Displacement Platform
This paper presents a novel precision three-dimensional platform based on vertical scanning that has practical application in surface topography measurement. The three-dimensional precision platform is composed of a two-dimensional platform with metrology system and a vertical scanning platform. When the work piece is measured, the closed loop control system controls the two-dimensional platform. Meanwhile, the Z direction servo motor and the piezoelectric actuator drive the vertical scanning platform to move vertically to realize the fine displacement. The diffraction grating displacement sensor detects the vertical relative displacement of the vertical scanning platform.
Zhijiu Ai, Xiaodong Zhang, Yun-Hae Kim and Prasad Yarlagadda
X. Li and S. H. Wang, "The Development of a Three Dimensional Displacement Platform", Advanced Materials Research, Vol. 339, pp. 195-199, 2011