Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films

Abstract:

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Optical, surface and structural properties of ZnO thin films fabricated by reactive radio- frequency (rf) magnetron sputtering and sol-gel coating methods are comparatively investigated. The optical properties of films produced by both techniques have very similar characteristics, however; the surface morphology and degree of crystallinity have different behaviors. The nanostructure columnar zinc oxide thin films can be synthesized by sol-gel coating methods which can have numerous applications requiring larger surface area. Also, the process scalability and large-scale manufacturing of these materials are discussed. It indicated that the nanostructure ZnO thin films can be synthesized with sol-gel methods at wafer levels with nano-grains and improved surface properties compared with reactive rf magnetron sputtering deposition.

Info:

Periodical:

Advanced Materials Research (Volumes 383-390)

Edited by:

Wu Fan

Pages:

4073-4078

DOI:

10.4028/www.scientific.net/AMR.383-390.4073

Citation:

A. H. Jayatissa et al., "Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films", Advanced Materials Research, Vols. 383-390, pp. 4073-4078, 2012

Online since:

November 2011

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Price:

$35.00

[1] V. A. Karpina, V. I. Lazorenko, V. C.V. Lashkarev, V. D. Dobrowolski, L. I. Kopylova, V. A. Baturin, S. A. Pustovoytov, and A. Ju Karpenko, Crystal Research and Technology Vol. 39 (2004) p.980.

DOI: 10.1002/crat.200310283

[2] K. Tominaga, T. Murayama, I. Mori, T. Ushiro, T. Moriga, and I. Nakabayashi, Ichiro, Thin Solid Films Vol. 386 (2001) p.267.

DOI: 10.1016/s0040-6090(00)01679-5

[3] T. Minami, H, Sonohara, S. Takata, and I. Fukuda, J. Vac, Sci. and Tech. A Vol. 13 (1995) p.1053.

[4] H. F. Liu, S. J. Chua, G. X. Hu, H. Gong, N. Xiang, J. Applied Physics Vol. 102 (2007) p.083529.

[5] S. Rani, P. Suri, P. K. Shishodia, and R. M. Mehra, Solar Energy Materials and Solar Cells Vol. 92 (2008) p.1639.

[6] Z. Xu, H. Deng, J. Xie, Y. Li, X. Zu, and S. Xue, J. Sol-Gel Science and Technology Vol. 36 (2005) p.223.

[7] H. G. Chen, S. R. Jian, Z. W. Li, K. W. Chen, and J.C. Li, J. Alloys and Compounds Vol. 504 (2010) p. S368.

[8] K. Haga, T. Suzuki, Y. Kashiwaba, H. Watanabe, B. P. Zhang, and Y. Segawa, Thin Solid Films Vol. 433 (2003) p.131.

[9] J. A. Libera, J. W. Elam, and M. J. Pellin, Thin Solid Films Vol. 516 (2008) p.6158.

[10] S. Lee, Y. H. Im, S. H. Kim, and Y. B. Hahn Vol. 39 (2006) p.24.

[11] J. J. Wu, H. I. Wen, C. H. Tseng, and S. C. Liu, Adva. Funct. Mat. Vol. 14 (2004) p.806.

[12] X. F. Zhou, Z. L. Hu, Y. Chen, and H. Y. Shang, Materials Research Bulletin Vol. 43 (2008) p.2790.

[13] K. Lin, and P. Tsai, Materials Science and Engineering B Vol. 139 (2007) p.81.

[14] J. Lee, D. Lee, and K. Keajoon, Thin Solid Films, Vol. 515 (2007) p.6094.

[15] R. L. Hoffman, B. J. Norris, and J. F. Wager, Applied Physics Letters Vol. 82 (2003) p.733.

[16] S. Gledhill, A. Grimm, N. Alexander, K. Nicholas, C. Tristan, L. Christian, F. Martha, H. Christian-Herbert, Thin Solid FilmsVol. 517 (2009) p.2309.

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