Improved Structural Design and Digital Control System for Micro-Machined Tuning Fork Gyroscope
This paper proposes an improved design of micro-machined tuning fork gyroscope (M-TFG) to better decouple the cross talk between the driving and sensing directions and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The peripheral circuit is also the important part to realize the function of the gyro system. Since the analog circuit has some inherent shortcomings, which has limited the accuracy of the gyro. In this paper, a digital control system for micro-comb is introduced.
J. Wen et al., "Improved Structural Design and Digital Control System for Micro-Machined Tuning Fork Gyroscope", Advanced Materials Research, Vols. 383-390, pp. 5997-6002, 2012