Improved Structural Design and Digital Control System for Micro-Machined Tuning Fork Gyroscope


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This paper proposes an improved design of micro-machined tuning fork gyroscope (M-TFG) to better decouple the cross talk between the driving and sensing directions and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The peripheral circuit is also the important part to realize the function of the gyro system. Since the analog circuit has some inherent shortcomings, which has limited the accuracy of the gyro. In this paper, a digital control system for micro-comb is introduced.



Advanced Materials Research (Volumes 383-390)

Edited by:

Wu Fan






J. Wen et al., "Improved Structural Design and Digital Control System for Micro-Machined Tuning Fork Gyroscope", Advanced Materials Research, Vols. 383-390, pp. 5997-6002, 2012

Online since:

November 2011




[1] N. Yazdi, F. Ayazi and K. Najafi, Micromachined inertial sensors, Proc. IEEE, vol. 86, no. 8, 1998, pp.1640-1659.

DOI: 10.1109/5.704269

[2] P. Greiff, B. Boxenhorn, T. King, and L. Niles, Silicon monolithic micromechanical gyroscope, in Proc. of the 6th Int. Conf. Solid-State Sensors and Actuators, San Francisco, CA, June 1991, pp.966-968.

DOI: 10.1109/sensor.1991.149051

[3] Sharma, M.F. Zaman, M. Zucher and F. Ayazi, A 0. 1°/hr bias drift electronically matched tuning fork microgyroscope, in Proc. of IEEE MEMS 2008, Tucson, AZ, USA, Jan., 2008, pp.6-9.

DOI: 10.1109/memsys.2008.4443579

[4] S. E. Alper and T. Akin, A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate, Micro electromechanical systems, Vol. 14, No. 4, Aug., 2005, pp.707-718.

DOI: 10.1109/jmems.2005.845400

[5] A. Sharma, M.F. Zaman, B. Amini and F. Ayazi. A High-Q In-Plane SOI Tuning Fork Device, in Proc. of IEEE Sensors 2004, Vienna, Austria, Oct. 2004. pp.467-470.

DOI: 10.1109/icsens.2004.1426201

[6] M.F. Zaman, A. Sharma and F. Ayazi. High Performance Matched-Mode Tuning Fork Gyroscope, in Proc. of IEEE MEMS 2006, Istanbul, Turkey, Jan. 2006, pp.66-69.

DOI: 10.1109/memsys.2006.1627737

[7] Kuehnel W, Sherman S A surface micromachined silicon accelerometer with on-chip detection circuitry. Sensor and Actuators, 1994, A 45: 7-16.

DOI: 10.1016/0924-4247(94)00815-9

[8] Zhou Bin, Gao Zhongyu, Chen Huai, Zhang Rong, Chen Zhiyong, Digital readout system for a micro-machined gyroscope and its demodulation algorithm, J Tsinghua Univ(sci&Tech), Vol44, No. 5, (2004).

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