Design and Simulation of RF-MEMS Tunable Capacitors Using Multiple Voltage Sources


Article Preview

A novel tunable RF-MEMS variable capacitor(varactor) is presented. The Flip -Flop structure of the design makes it possible to either increase or decrease the capacitance. Dimensions, sizes and the materials used in the device are chosen so that it can be manufactured in Urmia MEMS Lab. Silicon surface micromachining thechnology is used for the structure, which is CMOS compatible. Electrostatic actuation method is selected because of it's low power consumption so it can be used in low-power wireless applications. The value of the capacitor is changed by varying the gap between the two plates. Tuning voltage is in the range of 0-2 volts. The capacitor has the initial value of 0.43pF, maximum value of 0.92pF and minimum value of 0.3pF. Actuation and varactor plates are separate from each other. The structure is simple and can be fabricated by employing only 3 masks.



Advanced Materials Research (Volumes 403-408)

Edited by:

Li Yuan




N. Mohabbatian and E. Abbaspour Sani, "Design and Simulation of RF-MEMS Tunable Capacitors Using Multiple Voltage Sources", Advanced Materials Research, Vols. 403-408, pp. 4137-4140, 2012

Online since:

November 2011




[1] G. M. Rebeiz , RF MEMS: Theory , Design and Thechnology, New Jersey: J. Wiley and S., (2003).

[2] Clark, T.,C. Nguyen, L. P. B. Katehi, and G. M. Rebeiz, in: Micromachined devices for wireless communications(Proceedings of the IEEE 1998).

[3] Bakri-Kassem, M. and R. R. Mansour, in: Two movable-plate nitride-loaded MEMS variable capacitor (IEEE Transactions on Microwave Theory and Applications 52, 3, 2004).


[4] Dec, A. and K. Suyama, in: micromachined varactor with wide tuning range (Electronics Letters 33, 922-924, 1997).


[5] J. Chen, J. Zou, C. Liu, J. E. Schutt-Aine, S. Kang, in: Design and modelling of a micromachined High-Q Tunable capacitors with large tuning range and a vertical planar spiral indudtor (IEEE transactions on Electron Devices, v. 50 , 2003).


Fetching data from Crossref.
This may take some time to load.