Design and Simulation of RF MEMS Tunable Spiral Inductor


Article Preview

This paper presents a tunable inductor using MEMS technology .This tunable spiral inductor is designed in order to be used in RF circuits such as : controlled oscillators with voltage (VCO) , matching networks ,amplifiers etc . The electrostatic method is employed for tuning the inductor by the movement of cantilever beam downward and changing the value of magnetic flux. Value of inductance varies fram 1.15nh to 0.561 nh .therefore ,tunablity of 66.21% was achieved .Maximum quality factor in the above inductor was achieved az 13.88 in the frequency 0f 12 GHz and the value of resonance frequency was achieved as 19.5 GHz



Advanced Materials Research (Volumes 403-408)

Edited by:

Li Yuan




S. Gholamian and E. Abbaspour-Sani, "Design and Simulation of RF MEMS Tunable Spiral Inductor", Advanced Materials Research, Vols. 403-408, pp. 4148-4151, 2012

Online since:

November 2011




[1] H. Jiang, Y. Wang, J. -L. A. Yeh, and N. C. Tien, On-chip spiral inductors suspended over deep copper-lined cavities, IEEE Trans. Microwave Theory Tech., Vol. 48, No. 12, p.2415–2423, December (2000).

DOI: 10.1109/22.898992

[2] V. M. Lubecke, B. Barber, E. Chan, D. Lopez, M. E. Gross, and P. Gammel, Self-assembly MEMS variable and fixed RF inductors, IEEE Trans. Microwave Theory Tech., Vol. 49, No. 11, p.2093–2098, November (2001).

DOI: 10.1109/22.963142

[3] J. -B. Yoon, C. -H. Han, E. Yoon, and C. -K. Kim, Monolithic high-Q overhang inductors fabricated on silicon and glass substrates, in IEEE International Electron Device Meeting, December 1999, p.753–756.

DOI: 10.1109/iedm.1999.824260

[4] S. Chang and S. Sivoththaman, A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process, IEEE ELECTRON DEVICE LETTERS, Vol. 27, No. 11, November (2006).

DOI: 10.1109/led.2006.884712

[5] N. Ning ,X. P. Li ,J. Fan , X. Qian,W. C. Ng , and H. L. Seet,Y. P. Xu A Tunable Magnetic Inductor, IEEETRANSACTIONSONMAGNETICS, Vol. 42 No. 5, MAY (2006).

[6] Y. Yoshihara, H. Sugawara, H. Ito, K. Okada and K. Masu, Wide Tuning Range LC-VCO Using Variable Inductor for Reconfigurable RF Circuit, IEICE Trans. Fundamentals. Vol. E88-A. No. 2 February (2005).

DOI: 10.1093/ietfec/e88-a.2.507

[7] Norman c. Tien, Tunable RF MEMS Elements, IEEE (2004).

Fetching data from Crossref.
This may take some time to load.