Design & Simulation of Low Loss 5-Bit Ku Band Switched Line MEMS Phase Shifter on Gaas


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As the requirement for the low loss phase shifter increases, so does the development of RF MEMS as a solution. This paper presents the design & simulation of Switched line MEMS phase shifter for Ku band using GaAs substrate. The phase shift can be achieved by varying the lengths in delay path to the reference path for the same phase velocity. The electromagnetic & electromechanical simulations were carried out with various structural parameters to optimize the design. The novelties like low insertion loss, low actuation voltage with distributed actuation pads for DC and RF are used to make the design unique. The EM simulations are carried out using 3D simulator HFSS and a phase shift of 172.6 deg./dB for a total Phase shift of 348.75deg was achieved with return loss of 15.5dB over a frequency band from 16-18 GHz and a phase shift error less than ±2 degree in the 32 states. The electromechanical simulations are carried to achieve the low actuation voltage of 15.3V. These parameters make these suitable for the Phased array applications [1, 2].



Advanced Materials Research (Volumes 403-408)

Edited by:

Li Yuan




A. K. Sharma et al., "Design & Simulation of Low Loss 5-Bit Ku Band Switched Line MEMS Phase Shifter on Gaas", Advanced Materials Research, Vols. 403-408, pp. 5330-5334, 2012

Online since:

November 2011




[1] Young J. Ko, Jae Y. Park and Jong U. Bu, Integrated 3-bit RF MEMS Phase Shifters with Constant Phase Shift Fot Active Phased Array antennas in satellite Broadcasting Systems, The 12th International Conference on solid state sensors, Actuators and Microsystems, June 8-12, 2003, Boston.


[2] KaganTopalli, OzlemAydinCivi, SimsekDemir, SencerKoc, and Tayfun Akin, A monolithic Phased Array using 3-bit Distributed RF MEMS Phase Shifters, IEEE Trans. Microwave TheoryTech., vol. 56, no. 2, Jan. (2008).


[3] Gabriel M. Rebeiz, Guan-Leng Tan, Joseph S. Hayden, RF MEMS Phase Shifters: Design and Applications, IEEE microwave magazine, June (2002).


[4] Juo-Jung Hung, Laurent Dussopt and Gabriel M. Rebeiz, Distributed 2- and 3-Bit W-Band MEMS Phase Shifters on Glass Substrates, IEEE Trans. Microwave TheoryTech., vol. 52, no. 2, Feb. (2004).


[5] Kai Tang, Yu-ming Wu, Qun Wu, Hai-long Wang, Huai-chengZhu, Le-Wei Li, A Novel Dual –Frequency RF MEMS Phase Shifter, 19th International Zurich Symposium on Electromagnetic Compatibility, 19-22 May 2008, Singapore.


[6] Zhu Jian, Yu-Yuan Wei, Chen Chen , Zhang Yong, Lu Le, A Compact 5-bit Switched-line Digital MEMS Phase Shifter, Proceedings of the 1st IEEE InternationalConference on Nano/Micro Engineered and Molecular Systems , January 18 - 21, 2006, Zhuhai, China.


[7] Zhu J, Zhou B Lin, el al, A 4-bit digital MEMS phase shifter, [A], Proc. SPIE Smart Sensors, Actuators, and MEMS[C], 2003, 5116: 571-576.


[8] G.D. Lynes, G.E. Johnson, B.E. Huckleberry, N.H. Forrest, Design of a Broad-Band 4-Bit Loaded Switched-Line PhaseShifter, IEEE Transactions on Microwave Theory and Techniques, vol. 22, issue: 6, Jun 1974, pp.693-697.


[9] BalajiLakshminarayanan and Thomas M. Weller, Design and Modeling of 4-bit Slow-Wave MEMS Phase Shifters, IEEE Trans. Microwave TheoryTech., vol. 54, no. 1, Jan. (2006).


[10] Jian Qing, Yanling /shipway Li, ZongshengLai, Ziqiang Zhu and PeishengXin, Ka-Band Distributed MEMS Phase Shifters on Silicon using AlSi Suspended Membrane, , Journal of Microelectromechanical Systems, vol. 13, June2004.


[11] BalajiLakshminarayanan and Thomas M. Weller, Distributed MEMS Phase Shifters on Silicon Using Tapered Impedance Unit Cells , IEEE MTT-S Digest., (2002).


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