Low Cost Diffuser Based Micropump Using Pinch Actuation

Abstract:

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Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized via finite element analysis (FEA). The experiment result shows that the pump works well at low frequency of 29 Hz.

Info:

Periodical:

Edited by:

Jingtao Han, Sihai Jiao and Zhengyi Jiang

Pages:

397-400

DOI:

10.4028/www.scientific.net/AMR.422.397

Citation:

P. S. Chee et al., "Low Cost Diffuser Based Micropump Using Pinch Actuation", Advanced Materials Research, Vol. 422, pp. 397-400, 2012

Online since:

December 2011

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$35.00

[1] H. Ma, B. Hou, H. Wu, C. Lin, J. Gao, and M. Kou, Development and application of a diaphragm micro-pump with piezoelectric device, Microsystem Technologies 14 (2008) 1001-1007.

DOI: 10.1007/s00542-007-0462-6

[2] H. Jacobsen, K. Prume, B. Wagner, K. Ortner, and T. Jung, High-rate sputtering of thick PZT thin films for MEMS, Journal of Electroceramics 25 (2010) 198-202.

DOI: 10.1007/s10832-010-9615-6

[3] H. J. Zhang and C. J. Qiu, Characterization and MEMS application of low temperature TiNi(Cu) shape memory thin films, Materials Science and Engineering: A 438-440 (2006) 1106-1109.

DOI: 10.1016/j.msea.2006.01.114

[4] D. H. Jun, W. Y. Sim, and S. S. Yang, A novel constant delivery thermopneumatic micropump using surface tensions, Sensors and Actuators A: Physical 139 (2007) 210-215.

DOI: 10.1016/j.sna.2007.04.038

[5] M. Shen and M. A. M. Gijs, High-performance magnetic active-valve micropump, in Int. Conf. on Solid-State Sensors, Actuators and Microsystems, 2009, pp.1234-1237.

DOI: 10.1109/sensor.2009.5285881

[6] M. Shen, C. Yamahata, and M. A. M. Gijs, Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator, Microelectronic Engineering 85 (2008) 1104-1107.

DOI: 10.1016/j.mee.2007.12.013

[7] E. Stemme and G. Stemme, A valveless diffuser/nozzle-based fluid pump, Sensors and Actuators A: Physical 39 (1993) 159-167.

DOI: 10.1016/0924-4247(93)80213-z

[8] F. M. White, Fluid mechanics, 6th, New York, NY : McGraw-Hill, (2008).

[9] A. H. Gibson, Hydraulics and its application, Constable, London, (1945).

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