A Microvalve Driven by a Ferrofluid-Based Actuator
A novel ferrofluid-based microvalve adopting an electromagnetic actuation is presented. In the device, ferrofluid controlled by magnetic force is used as a microactuator. The deflection of the diaphragm caused by the ferrofluid-based actuator opens or closes the fluid flow in the microchannel. A detailed description of the design and working principle of the microvalve is presented. The driving force generated by the ferrofluid under applied magnetic field has been measured by a microforce sensor. And the deflection of the diaphragm has been simulated by ANSYS software.
Cai Suo Zhang
T. G. Liu et al., "A Microvalve Driven by a Ferrofluid-Based Actuator", Advanced Materials Research, Vols. 433-440, pp. 3767-3772, 2012