Study on Dynamic Characteristic of Bipolar Decoupling Micro-Machined Gyroscope
The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper, the bipolar decoupling micro-machined models were analyzed, the drive and test mode frequency at atmospheric pressure were tested, the scale factor and the output noise were mensurated. The results showed that the high linearity micro-gyroscope had achieved high linearity and good dynamic character at atmospheric pressure.
J. T. Shi et al., "Study on Dynamic Characteristic of Bipolar Decoupling Micro-Machined Gyroscope", Advanced Materials Research, Vols. 443-444, pp. 980-985, 2012