Design and Characterization of Single Beam for Latching Electrothermal Microswitch
This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch consists of two cantilever beams using bimorph electrothermal actuator with mechanical latching for performing low power bistable relay applications. A stable state can be acquired without continuous power which is only needed to switch between two stable states of the microactuator. The single beam is discussed mainly to judge the possibility of realizing the designed function. First, reasonable shape of the resistance is designed using finite element analysis software ANSYS. Then, mechanical performance was characterized by WYKO NT1100 optical profiling system, the tip deflection of single beam can meet the designed demand.
Wenzhe Chen, Pinqiang Dai, Yonglu Chen, Dingning Chen and Zhengyi Jiang
Y. Zhang et al., "Design and Characterization of Single Beam for Latching Electrothermal Microswitch", Advanced Materials Research, Vols. 468-471, pp. 286-289, 2012