Microstructure and Tribological Performance of a-CNx /TiNx Composite Films Prepared by Pulsed Laser Deposition
CNx/TiNx composite films were prepared on high-speed steel (HSS) substrate by pulsed laser co-deposition process with the Ti/graphite combined targets and at a substrate temperature of 200 °C. The composition, morphology and microstructure of the films were characterized by energy dispersive X-ray spectrum (EDS), scanning electron microscopy (SEM), X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). In the graphite/Ti range of 0.5–2.0 of the target, the composite films composed of TiNx, a-CNx and a small amount of metallic Ti. The TiNx disappeared in the films at a high graphite/Ti ratio of the target. The adhesion and tribological performance of the films were investigated using a conventional scratch tester and a ball-on-disk tribometer respectively. With increasing the graphite/Ti ratio of the target, the adhesion to substrate of the composite films deteriorated from 46 N to 26 N, and the friction coefficient drcreased from 0.23 to 0.17. The composite film deposited at the graphite/Ti ratio of 1.0 showed a low friction coefficient, good adhesion and wear rate of 3.2×10–7 mm3/Nm in humid air.
Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam
X.H. Zheng et al., "Microstructure and Tribological Performance of a-CNx /TiNx Composite Films Prepared by Pulsed Laser Deposition", Advanced Materials Research, Vols. 47-50, pp. 540-544, 2008