Preparation and Tribological Properties of Amorphous Ti/C Multilayers by Pulsed Laser Deposition
Amorphous Ti/C multilayers were prepared on titanium-alloy and silicon (100)-wafer substrates by pulsed laser deposition. Films with different Ti concentration were synthesized by changing the ablating time for Ti and C targets. The morphology and microstructure of Ti/C multilayers were characterized by scanning electron microscopy (SEM), Raman spectroscopy and X-ray diffraction (XRD). Both of the Ti and C monolayers were amorphous. The metallic Ti stimulated the formation of more amorphous carbon phase by reducing the sp2 aromatic bonds and elongating the C-C chain bonds. The tribological properties of Ti/C multilayers were investigated by ball-on-disk tribometer. The pure C film and the multilayers containing more than 68.8 at.% of Ti showed low wear resistance. The multilayer contained 36.8 at.% of Ti exhibited the lowest wear rate at 3.54×10–16 m3/N·m. The formation of carbon related interlayer and its effect on tribological performance of the films were discussed.
Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam
C.F. Hong et al., "Preparation and Tribological Properties of Amorphous Ti/C Multilayers by Pulsed Laser Deposition", Advanced Materials Research, Vols. 47-50, pp. 617-620, 2008