Characterization and Properties of CrN and CrBN Films

Abstract:

Article Preview

The CrN films and CrBN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrN have preferential orientation of (111), (200) and (222). And the patterns of CrBN films is similar to that of CrN. The CrN films have smooth surfaces with dense and continuous microstructure and the CrBN films have glassy packed structure without columnar grains. The hardness of CrBN films were remarkable improved because of B attending.

Info:

Periodical:

Advanced Materials Research (Volumes 490-495)

Edited by:

Ran Chen and Wen-Pei Sung

Pages:

3086-3088

Citation:

X. M. Yuan et al., "Characterization and Properties of CrN and CrBN Films", Advanced Materials Research, Vols. 490-495, pp. 3086-3088, 2012

Online since:

March 2012

Export:

Price:

$41.00

[1] R. Daniel, K. J. Martinschitz, J. Keckes, Texture development in polycrystalline CrN films: the role of growth conditions and a Cr interlayer, J. Phys. D: Appl. Phys, 42(2009) 13.

DOI: https://doi.org/10.1088/0022-3727/42/7/075401

[2] Barata. A, L. Cunhal, C. Moura, Thin Solid Films, 398(2001) 501.

[3] J. H. Xu, H. Umehara, I, Kojima, Appl. Surf. Sci., 201 (2002) 208-218.

[4] D. Y. Wang, K. W. Weng, Surf. Coat. Technol., 137(2001)31.

[5] C. Gautier, H. Moussaoui, F. Elstner, J. Machet, Surf. Coat. Technol., 86(1996)254.

[6] L. H. Chiu, S. F. Yang, W. C. Hsien, A. S. Cheng, Surf. Coat. Technol., 154(2002)282.

[7] Z. B. Zhao, Z. U. Rek, S. M. Yalisove, I. C. Biello, Thin Solid Films, 472(2005) 96.

[8] C. W. Zou, H. J. Wang, C. S. Liu, L. P. Guo, D. J. Fu, Characterization and properties of CrN films deposited by ion-source-enhanced middle frequency magnetron sputtering, Vacuum, 83(2009) 1086-1090.

DOI: https://doi.org/10.1016/j.vacuum.2008.12.007

[9] J. D. Demaree, C. G. Fountzoulas, J. K. Hirvonen, Chromium nitride films produced by ion beam assisted deposition, Surf. Coat. Technol., 86-87(1996)309.

DOI: https://doi.org/10.1016/s0257-8972(96)03035-6

[10] W. Ensinger, M. Kiuchi, Ion beam assisted deposition of nitrogen-containing chromium films: A comparison of argon vs nitrogen ions, Surf. Coat. Technol., 203(2009)2763.

DOI: https://doi.org/10.1016/j.surfcoat.2009.02.118