Characterization and Properties of CrN and CrBN Films


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The CrN films and CrBN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrN have preferential orientation of (111), (200) and (222). And the patterns of CrBN films is similar to that of CrN. The CrN films have smooth surfaces with dense and continuous microstructure and the CrBN films have glassy packed structure without columnar grains. The hardness of CrBN films were remarkable improved because of B attending.



Advanced Materials Research (Volumes 490-495)

Edited by:

Ran Chen and Wen-Pei Sung




X. M. Yuan et al., "Characterization and Properties of CrN and CrBN Films", Advanced Materials Research, Vols. 490-495, pp. 3086-3088, 2012

Online since:

March 2012




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