Fabrication of Microchannels on SiC Substrate by Femtosecond Laser
A novel femtosecond laser directly writing method was utilized to fabricate microchannels on silicon carbide (SiC) substrate. The micro patterns were transferred to a Polydimethylsiloxane (PDMS) stamp, characterized by both optical microscope and scanning electron microscope (SEM). The relationship between size (depth and width) of channels and power of laser pulse were discussed in detail.
Hongbing Ji, Yixin Chen and Shengzhou Chen
Y. H. Li et al., "Fabrication of Microchannels on SiC Substrate by Femtosecond Laser", Advanced Materials Research, Vols. 557-559, pp. 1322-1325, 2012