Analysis on Environmental Materials for Energy Saving with Protection Measures of Integrated Circuit Industry
Power integrated circuit chip(ICC) is one kind of environmental material for energy saving. In order to analyze the reliability on environmental protection measures of integrated circuit industry, a proposed ICC project was taken as an example to investigate and analyze its engineering features and processing measures on production waste water, waste gas, waste solid and liquid, noise control and plant greening. It showed that there were 5 kinds of production wastewater containing acid & alkali, fluorine, ammonia, grinding impurity and organic respectively and 4 kinds of waste gases i.e. acid/alkali, organic solvent and process exhaust waste gases. Pollution treatment measures for wastewater, sewage and waste gases were mature technically and were effective with high efficiency. Treated wastewater can meet state discharge standards. Gas pollutants could be removed by around 90%. Dangerous waste solids and liquids would be delivered to the qualified company. Measures of vibration reduction, noise elimination, sound absorption and insulation etc. would be taken to control noises from power station and create a good environment. This work is an indispensable part of environmental impact assessment on IC industry.
Helen Zhang, David Jin and X.J. Zhao
R. J. Su, "Analysis on Environmental Materials for Energy Saving with Protection Measures of Integrated Circuit Industry", Advanced Materials Research, Vol. 578, pp. 17-20, 2012