Development of an On-Machine 3D Texture Analyser
Texture metrology of large optical components causes many practical problems, from handling heavy units in the laboratory, to applying existing bench top devices, unable to access most of the part area. Application of an on-machine device allows these practical issues to be overcome and provides an opportunity for an automated metrology process. We describe our work on a texture interferometer that is mounted onto a Zeeko optical polishing machine for in-process surface texture measurements on large optics.
Zone-Ching Lin, You-Min Huang, Chao-Chang Arthur Chen and Liang-Kuang Chen
M. Bibby and C. King, "Development of an On-Machine 3D Texture Analyser", Advanced Materials Research, Vol. 579, pp. 338-347, 2012