Development of an On-Machine 3D Texture Analyser

Abstract:

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Texture metrology of large optical components causes many practical problems, from handling heavy units in the laboratory, to applying existing bench top devices, unable to access most of the part area. Application of an on-machine device allows these practical issues to be overcome and provides an opportunity for an automated metrology process. We describe our work on a texture interferometer that is mounted onto a Zeeko optical polishing machine for in-process surface texture measurements on large optics.

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Periodical:

Edited by:

Zone-Ching Lin, You-Min Huang, Chao-Chang Arthur Chen and Liang-Kuang Chen

Pages:

338-347

Citation:

M. Bibby and C. King, "Development of an On-Machine 3D Texture Analyser", Advanced Materials Research, Vol. 579, pp. 338-347, 2012

Online since:

October 2012

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DOI: https://doi.org/10.1117/12.454877

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