Study on Measuring Perpendicularity Based-On Non-Diffracting Beam as the References
A new method for measuring perpendicularity is developed in this paper, in which the non-diffracting beam that illuminates a pentagonal prism to produce the vertical reference is used as the straight-line reference and CCD is used as the sensor to gauge the position error to the references. Three evaluation algorithms of the perpendicularity error are also given in the paper. And furthermore, perpendicularity of a Coordinate Measuring Machine was measured by this method, which is easy to be operated. The results and analysis indicate that its working distance can be more than 15m while the precision can be less than±5μm/m.
X. B. Zhang et al., "Study on Measuring Perpendicularity Based-On Non-Diffracting Beam as the References", Advanced Materials Research, Vol. 586, pp. 349-355, 2012