Test of Reliability of Micro-Accelerometer in Vibration Environment


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In order to quickly determine the weak links of micro-accelerometer in vibration environment, the test profile of step stress and sustained stress were designed in the vibration environment on micro-accelerometer, the relevant reliability enhancement test was actualized for micro-accelerometer of 10g, the failure time was given in the sustained stress. The failure mode and failure mechanism were analyzed by detailed test results, the ANSYS software was used to simulate the move route and stress distribution of cantilever beam in the conditions of being adhesion strength and without it. According to the step stress test and constant stress test of RET, the various stress limit, the relevant failure mode and the failure mechanism were given in the vibration environment.



Advanced Materials Research (Volumes 588-589)

Edited by:

Lawrence Lim




X. H. Ma and C. L. Li, "Test of Reliability of Micro-Accelerometer in Vibration Environment", Advanced Materials Research, Vols. 588-589, pp. 1881-1884, 2012

Online since:

November 2012




[1] Edwards J R. Finite element analysis of the shock response and head slap behaviour of a hard disk drive [J]. Transactions on Magnetises. 1999, 35: 863~867.

DOI: https://doi.org/10.1109/20.753799

[2] Srikar V. T , Stephen D. Senturia , the Design and Analysis of Shock Resistant Microsystems (MEMS) [C]. ansdusers'01, Munich, Germany , June , 10-14, (2001).

[3] Sun Yuancheng, Yang bo, Peng bo, etal. A Failure Mode of Micro Mechanical Shock Sensors[J]. Chinese Journal of Sensors and Actuators, 2006, 19, (2): 1610-1612. (in Chinese).

[4] J Xiong, R A Shenoi, Z Gao. Small sample theory for reliability design. Journal of strain analysis, 2002, 37(1): 87-92.

[5] J. A. Walraven, Failure Analysis Issues in Microelectrome-chanical Systems[J]. Microelectronics Reliability, 2005, (45): 1750-1757.