Design and Pspice Simulation on Interface Circuit of Capacitive Micro-Gyroscope
For testing angle velocity, testing system of micromechanical gyroscope is applied widely in both military and civil areas, and it is provided with broad foreground of evolution and application, The characteristics of the application require them have high sensitivity and accuracy, under this conditions, technology development level of interface circuit reach their limits, and restricts test performance improvement of the system of micro-gyroscope. In this paper the equivalent electrical model of capacitive micro-gyroscope is established firstly, then a novel interface circuit is designed, the interface circuit include two part, driving-circuit and detecting- circuit, and the feasibility of the driving-circuit and detecting- circuit is emulated and validated by Pspice respectively. The detecting circuit of static state capacitance is come true , and theoretical accuracy of it is 10-18F.
Liangchi Zhang, Chunliang Zhang, Jeng-Haur Horng and Zichen Chen
Y. B. Shi et al., "Design and Pspice Simulation on Interface Circuit of Capacitive Micro-Gyroscope", Advanced Materials Research, Vols. 591-593, pp. 284-287, 2012