Overview Design Method of MEMS Devices System
With the development of MEMS devices, the design requirements to MEMS devices are more and more high. Computer Aided design of MEMS devices have been from the simple structure, fabrication process design to the development of the system design. The corresponding design pattern originally used to be to function and performance, which is called Bottom-Up, is developing to such a pattern named Top-Down to meet demands as the final purpose, and it is more reasonable. According to the current situation of MEMS technology, this paper presents a timely system design method of micro devices based on Top-Down, and further discuss the design process of Top-Down of micro devices.
Liangchi Zhang, Chunliang Zhang, Jeng-Haur Horng and Zichen Chen
H. Zhang et al., "Overview Design Method of MEMS Devices System", Advanced Materials Research, Vols. 591-593, pp. 63-66, 2012