Surface Morphology of Films Grown by Size-Selected Ta Nanoparticles
Tantalum nanoparticle (NP) films have been deposited on silicon substrates, using sputter deposition with gas aggregation. The resultant NP films have been characterized using high resolution atomic force microscopy and X-ray fluorescence spectroscopy. The films remain stable and the NPs maintain a spherical structure on annealing up to 600 °C. In addition to characterization, these NP films have been locally patterned by atomic force microscope scanning of the surface in contact mode.
V. Singh et al., "Surface Morphology of Films Grown by Size-Selected Ta Nanoparticles", Advanced Materials Research, Vol. 647, pp. 732-737, 2013