Surface Morphology of Films Grown by Size-Selected Ta Nanoparticles


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Tantalum nanoparticle (NP) films have been deposited on silicon substrates, using sputter deposition with gas aggregation. The resultant NP films have been characterized using high resolution atomic force microscopy and X-ray fluorescence spectroscopy. The films remain stable and the NPs maintain a spherical structure on annealing up to 600 °C. In addition to characterization, these NP films have been locally patterned by atomic force microscope scanning of the surface in contact mode.



Edited by:

Tingting Wang




V. Singh et al., "Surface Morphology of Films Grown by Size-Selected Ta Nanoparticles", Advanced Materials Research, Vol. 647, pp. 732-737, 2013

Online since:

January 2013




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