AFM Characterization of PS Prepared in Different Concentration of Hydrofluoric Acid


Article Preview

The effect of HF concentration on the surface structure of porous silicon (PS) was carefully investigated by the AFM characterization. The results showed that no pores were present on PS surface which was prepared under the higher concentration of HF (10%). However, the pores were gradually visible with the HF concentration reduction. The main pores diameter was about 100 nm, when the concentration is 5.71%. The data of surface roughness and the main height distribution of the “hill” both showed an increase with the reduction of concentration, from 6.39 nm increase to 16.9 nm and from 30 nm increase to 90 nm, respectively, which implied that the pores were better exposed under the lower HF concentration.



Edited by:

Hailin Cong, Bing Yu and Xing Lu




S. Y. Li et al., "AFM Characterization of PS Prepared in Different Concentration of Hydrofluoric Acid", Advanced Materials Research, Vol. 669, pp. 217-220, 2013

Online since:

March 2013




[1] L.T. Canham, Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers. Appl. Phys. Lett. 57 (1990) 1046-1048.


[2] P. Steiner, F. kozlowski, W. Lang, Light‐emitting porous silicon diode with an increased electroluminescence quantum efficiency. Appl. Phys. Lett. 62 (1993) 2700-2702.


[3] R. T. Collins, P.M. Fauchet, M.A. Tischler, Porous Silicon: From Luminescence to LEDs. Phys. Today 50 (1997) 24-31.


[4] S. Ozdemir, J. L. Gole, A phosphine detection matrix using nanostructure modified porous silicon gas sensors, Sens. Actuators B 151 (2010) 274-280.


[5] K. -S. Kim, G. -S. Chung, Characterization of porous cubic silicon carbide deposited with Pd and Pt nanoparticles as a hydrogen sensor, Sens. Actuators B 157 (2011) 482-487.


[6] I. Suárez, V. Chirvony, D. Hill, J. Martínez-Pastor, Simulation of surface-modified porous silicon photonic crystals for biosensing applications, Photonic. Nanostruct. 10 (2012) 304-311.


[7] M. B. Rabha, B. Bessaïs, Enhancement of photovoltaic properties of multicrystalline silicon solar cells by combination of buried metallic contacts and thin porous silicon, Sol. Energy 84 (2010) 486-491.


[8] V. Lysenko, S. Périchon, B. Remaki, D. Barbier, Thermal isolation in microsystems with porous silicon, Sens. Actuators A 99 (2002) 13-24.


[9] O. Tabasi, C. Falamaki, Z. Khalaj, Functionalized mesoporous silicon for targeted-drug-delivery, Colloid. Surface. B 98 (2012) 18-25.


[10] M. Kaasalainen, E. Mäkilä, J. Riikonen, et al., Effect of isotonic solutions and peptide adsorption on zeta potential of porous silicon nanoparticle drug delivery formulations, Int. J. Pharm. 431 (2012) 230-236.


[11] Y. Lee, J. Lee, Y. Shul, S. Lim, Effect of wafer resistivity and HF concentration on the formation of vertically aligned porous silicon, J. Ind. Eng. Chem. 14 (2008) 105-109.


[12] A. Halimaoui, Porous silicon formation by anodisation, in: L. Canham (Eds. ), Properties of Porous Silicon, IEE Inspec, London, 1997, pp.59-65.

[13] J. Dian, A. Macek, D. Nižňanský, et al., SEM and HRTEM study of porous silicon—relationship between fabrication, morphology and optical properties, Appl. Surf. Sci. 238 (2004) 169–174.