Fabrication of Micro-Structures by Micro-ECM
The machining of materials on microscopic scales is considered to be great importance to a wide variety of fields. Electrochemical Micro-machining (EMM) appears to be promising to machine the micro-structures in future due to the material is dissolved at the unit of ion. This paper is focused on developing a micro electrochemical machining system in which the micro-structures such as micro-cylinder, multiple micro-electrodes, micro-holes and micro-slot were processed. The micro-electrodes were prepared in a precisely controlling the electrochemical etching process. Mathematical model controlling the diameters of electrodes was built up. Furthermore, the obtained micro-electrodes were selected as the cathode tool for micro holes drilling and micro-slot milling using pulse power in Micro-ECM.
Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen
M. H. Wang et al., "Fabrication of Micro-Structures by Micro-ECM", Advanced Materials Research, Vols. 69-70, pp. 229-233, 2009