NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009

Volume 74

doi: 10.4028/

Paper Title Page

Authors: Tsung Hsing Chan, Chiang Ho Cheng, An Shik Yang, Li Yu Tseng

Abstract: The current paper endeavors to present the design, fabrication, and test of a novel valveless piezoelectrically actuated micropump. The...

Authors: Muhamad Ramdzan Buyong, Norazreen Abd Aziz, Burhanuddin Yeop Majlis

Abstract: In the world of MEMS processing today, fabrications of membrane are performed using bulk micromachining (BMM). However these techniques not...

Authors: Chih Jer Lin, Shu Yin Chen

Abstract: The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning...

Authors: Mitra Damghanian, Burhanuddin Yeop Majlis

Abstract: A novel MEMS capacitive pressure sensor array is designed and fabricated for fingerprint acquisition application. Based on analytical...

Authors: Fatimah Lina Ayatollahi, Burhanuddin Yeop Majlis

Abstract: This paper presents material properties of a micromachined mesoscopic acoustic speaker for hearing aid applications. The microspeaker has a...

Authors: Mohammad Yeakub Ali, Mohd Aliff Omar, Khairul Irman Othman, Wayne N.P. Hung

Abstract: This paper discusses burr formation in micromilling of AISI 304 stainless steel. Chip load, cutting speed and the application of coolant...

Authors: Cheng Hsien Wu, Chen Hao Hung, Ya Zhen Hu

Abstract: This report describes the application of hot embossing to produce parts with microstructure. An embossing machine, designed for...

Authors: Jin Ho Yoon, Jung Sik Kim

Abstract: In this study, the micro gas sensor for NOx gas was fabricated by using a MEMS technology and sol-gel process. The sensing electrode and...

Authors: Jaibir Sharma, Amitava DasGupta

Abstract: This paper describes a new fabrication technique for RF MEMS switches where the coplanar waveguide (CPW) is fabricated in a basin. A planar...

Authors: Ille C. Gebeshuber, Herbert Stachelberger, Bahram Azizollah Ganji, Dee Chang Fu, Jumril Yunas, Burhanuddin Yeop Majlis

Abstract: A novel way to describe the complexity of biological and engineering approaches depending on the number of different base materials is...


Showing 51 to 60 of 78 Paper Titles