NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009

Volume 74

doi: 10.4028/

Paper Title Page

Authors: Pijus Kundu, A. Ray Chaudhuri, S. Das, T.K. Bhattacharyya

Abstract: In this paper, the etching characteristic of diamond like nanocomposite thin films materials in hydrazine has been reported. The experiments...

Authors: L. Jiao, Eyk Ng, L.M. Wee, Hong Yu Zheng

Abstract: Clark MXR femtosecond (fs) laser micro structuring with pulse duration of 200fs up to a wavelength of 1030nm with a nominal frequency of 1...

Authors: Juliana Johari, Jumril Yunas, Burhanuddin Yeop Majlis

Abstract: . In this study, a Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication...

Authors: Rosminazuin A. Rahim, Badariah Bais, Burhanuddin Yeop Majlis

Abstract: This paper uses a hybrid simulation approach in CoventorWare design environment which combines finite element analysis and circuit...

Authors: Nur Azrina Dzulkefli, Badariah Bais, Burhanuddin Yeop Majlis

Abstract: A glucose sensitive actuator for drug delivery system (DDS) consists of silicon boss, micro channel and outlet of the microvalve.The...

Authors: Li Jia, Foo Qi Hui, Ang Xiao Fang, Jun Wei, C.C. Wong

Abstract: Direct metal thermocompression bonding is one of the key approaches used in creating interconnections in many heterogeneous devices. It has...

Authors: Wen Wen Zhou, Zhi Yong Chen, Bin Zhou, Rong Zhang

Abstract: This paper presents mechanism and sources of in-phase coupling error (i.e. bias drift) in a micromachined silicon vibratory gyroscope with...

Authors: Voytekunas Vanda Yu, Ng Feng Lin, Koh Chai Ling, Abadie Marc

Abstract: Multifunctional epoxy resin series Epiclon HP-7200 is classified under the high performance series and is well known for its application in...

Authors: Young Joon Yoon, Jae Kyung Choi, Jong Woo Lim, Hyo Tae Kim, Ji Hoon Kim, Youn Suk Choi, Jong Heun Lee, Jong Hee Kim

Abstract: Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based...

Authors: Yang Gao, Xiao Peng Wang, Tian Ning Chen

Abstract: To eliminate the release-delayed phenomenon of macromolecular drug delivery system at the early stage, biodegradable implantable drug...


Showing 61 to 70 of 78 Paper Titles