Study on Micro Blasting of Glass for Micro Channel Forming


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The production of a compact chemical reactor called a micro channel device requires a glass microfabrication technique since it involves the formation of a micro channel on the surface of a glass substrate. We propose a direct mask drawing and micro blasting technique, designed to form a micro channel on a glass substrate. This method is suitable for producing a wide variety of patterns in small quantities. In conventional micro blasting the channel formed has a narrow base i.e. “V” shape cross-sections. Using a seesaw table to tilt the glass substrate during blasting, we can produce a wider based channel i.e. “U” shape cross-sections.



Advanced Materials Research (Volumes 76-78)

Edited by:

Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa




S. Koshimizu "Study on Micro Blasting of Glass for Micro Channel Forming", Advanced Materials Research, Vols. 76-78, pp. 373-378, 2009

Online since:

June 2009




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DOI: 10.1109/mems.2004.1290680

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