Study on Micro Blasting of Glass for Micro Channel Forming

Abstract:

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The production of a compact chemical reactor called a micro channel device requires a glass microfabrication technique since it involves the formation of a micro channel on the surface of a glass substrate. We propose a direct mask drawing and micro blasting technique, designed to form a micro channel on a glass substrate. This method is suitable for producing a wide variety of patterns in small quantities. In conventional micro blasting the channel formed has a narrow base i.e. “V” shape cross-sections. Using a seesaw table to tilt the glass substrate during blasting, we can produce a wider based channel i.e. “U” shape cross-sections.

Info:

Periodical:

Advanced Materials Research (Volumes 76-78)

Edited by:

Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa

Pages:

373-378

Citation:

S. Koshimizu "Study on Micro Blasting of Glass for Micro Channel Forming", Advanced Materials Research, Vols. 76-78, pp. 373-378, 2009

Online since:

June 2009

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Price:

$38.00

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[2] M. Hirayama, et al: Micro-blasting Technology, Journal of JSAT (in Japanese), Vol. 46, No. 3 (2002), p.111.

[3] H. Wensink, et al: Mask materials for powder blasting, J. Micromech. Microeng, No. 10 (2000), p.175.

[4] H. Yagyu, et al: Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer, Technical digest of MEMS2004, p.697.

DOI: https://doi.org/10.1109/mems.2004.1290680

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