Study on Micro Blasting of Glass for Micro Channel Forming

Abstract:

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The production of a compact chemical reactor called a micro channel device requires a glass microfabrication technique since it involves the formation of a micro channel on the surface of a glass substrate. We propose a direct mask drawing and micro blasting technique, designed to form a micro channel on a glass substrate. This method is suitable for producing a wide variety of patterns in small quantities. In conventional micro blasting the channel formed has a narrow base i.e. “V” shape cross-sections. Using a seesaw table to tilt the glass substrate during blasting, we can produce a wider based channel i.e. “U” shape cross-sections.

Info:

Periodical:

Advanced Materials Research (Volumes 76-78)

Edited by:

Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa

Pages:

373-378

DOI:

10.4028/www.scientific.net/AMR.76-78.373

Citation:

S. Koshimizu "Study on Micro Blasting of Glass for Micro Channel Forming", Advanced Materials Research, Vols. 76-78, pp. 373-378, 2009

Online since:

June 2009

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Price:

$35.00

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