Analysis of Fixed Abrasive Pads with a Nano-Sized Diamond for Silicon Wafer Polishing
Current polishing pads cannot polish a workpiece without using slurry with free abrasive. The new slurry is required to be continually poured into the working area, so more than half of the slurry may be lost from the table without contacting the wafer surface; this leads to economic and environmental problems. In the current work, the fixed abrasive pad was used, where nano-sized diamond abrasives were embedded in the polishing pad; distilled water, rather than slurry, was used. The effect of various fixed abrasive pad designs on polishing characteristics during silicon wafer polishing was investigated. Moreover, the primary function of fixed abrasive was to remove the rough parts of silicon wafer as they were being polished. Consequently, it needed to disperse the nano-sized abrasives into the pad material with high hardness value; this way, working abrasives are not pressed into the pad material. Furthermore, with the use of a pad conditioner, the interior working abrasives were exposed to the pad surface. As a result, the best outcome of using the fixed abrasive pad with a nano-sized diamond was a surface roughness of Ra 0.47 nm.
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa
C. Y. Shih et al., "Analysis of Fixed Abrasive Pads with a Nano-Sized Diamond for Silicon Wafer Polishing", Advanced Materials Research, Vols. 76-78, pp. 410-415, 2009