Micro WEDM is a versatile technique used to machine electrically conductive materials to make components for micro system technologies. This paper presents an attempt to develop an appropriate machining strategy for micro WEDM of titanium alloy using zinc coated copper wire of 70 µm diameter. Voltage, capacitance, feed, wire tension and wire speed were taken as input parameters. Surface finish is considered as the measure of process performance. Design of experiments was done using Taguchi L16 orthogonal array and optimization was carried out using Taguchi S/N ratio technique. The results obtained from the experiments were analyzed with ANOVA method to find the significance of each input factor on the surface quality. In addition ANN model was developed and trained.