TiO2 films were fabricated on stainless steel (SS) substrate by plasma surface alloying and thermal oxidation duplex process. Composition and microstructure of the films were characterized using glow discharge spectrometer (GDOES), X-ray photoelectron spectroscopy (XPS) and XRD. Results reveal that the TiO2 films are dense, homogeneous and existed in a complete anatase structure. Both Ti and O elements show gradient distribution in the films. The wear behavior of TiO2 films in Hanks’ solution indicates that the films display much better wear resistance and antifriction performance than that of SS substrate. Electrochemistry noise tests indicate that the TiO2 films effectively retard the local pitting and crevice corrosion of the SS substrate.