Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering
The polycrystalline V2O5 films as the anode in V2O5 /LiPON /LiCoO2 lithium microbattary were prepared by RF magnetron sputtering system. The V2O5 films’ crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500μm×500μm, and the thickness of V2O5, LiPON and LiCoO2 films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36μAhcm-2μm-1 and 9.63μAhcm-2μm-1 after 40 cycles.
Yansheng Yin and Xin Wang
L. T. Zhang et al., "Application of V2O5 in Thin Film Microbatteries Prepared by RF Magnetron Sputtering", Advanced Materials Research, Vols. 79-82, pp. 931-934, 2009