ITO Thin-Film Removal Process Using Design of Rolling Tool
Although the low yield rate of ITO thin-film during the production of semiconductor techniques is easily seen. Current work presents a new modus of electrochemical machining using a design rolling tool as electrodes constructs a precision recycle process offering faster performance in removing the color filter surface’s ITO thin-film. Through establishing an ultra-precise recycling process to remove the thin-film microstructure, this helps the semiconductor optoelectronic industry to reduce both production costs and pollution. The design features of the removal processes for a thin-film and the tool design of rolling electrodes are of major interest. Higher electrical current is not required when an effective feeding electrodes is used to reduce the response area. In the current experiment, the author utilizes a 5th Generation TFT-LCD. The design electrodes (rolling tool) are used with continuous and pulsed direct current in the electrochemical machining experiment. A displays’ color filter with a fast feed rate is combined with enough electric power to provide highly effective removal. High rotational speed of the rolling tool and high flow velocity of the electrolyte elevates the discharge mobility and improves the removal effect. A larger diameter of the fictitious rotation circle of the cathode and a small end radius of the cathode provide better removal effect. A precision recycling process is presented using an effective rolling tool in the electrochemical machining. It only needs a short period of time to remove the ITO thin-film easily and cleanly.
M. S. J. Hashmi, B. S. Yilbas and S. Naher
P. S. Pa "ITO Thin-Film Removal Process Using Design of Rolling Tool ", Advanced Materials Research, Vols. 83-86, pp. 622-629, 2010