Vibration Characteristics of Ni Thin Film Diaphragm by Acoustic Wave
Vibration characteristics of 5μm- thick Ni film were investigated with applying acoustic wave to the Ni diaphragm of 2mm x 2mm unit size. In the modal analysis, the first resonance mode of the diaphragm showed an out-of-plane piston-like movement and the first natural frequency was 1,643 Hz, whereas in this experiment, the first natural frequency appears at about 1,300 Hz under sound pressure of 0.2 Pa. The amplitudes of diaphragm increase with increase of sound pressure level in the applied frequency range from 300 Hz to 1,000 Hz, indicating that area of diaphragm influences directly the amplitude.
Zhengyi Jiang and Chunliang Zhang
G. S. Cho et al., "Vibration Characteristics of Ni Thin Film Diaphragm by Acoustic Wave", Advanced Materials Research, Vols. 97-101, pp. 2361-2364, 2010