Design and Analysis of MEMS-Based Actuator

Abstract:

Article Preview

One Micro-Electro-Mechanical System(MEMS) based actuator that fabricated by LIGA (Lithographie ,Galanoformung and Abformung) technology was designed to distinguish the change of the exterior condition. In order to prove whether the parts in the actuator intervene each other during motion, ADAMS software was utilized to simulate the motion. The rigid-flexible coupling dynamic modeling of the design was obtained by combining finite element method (FEM) with Lagrange equation, the mathematics modeling was solved with Gear method in ADAMS. The results showed that the MEMS-based actuator could move smoothly, and the simulated curve meets the intent.

Info:

Periodical:

Advanced Materials Research (Volumes 97-101)

Edited by:

Zhengyi Jiang and Chunliang Zhang

Pages:

3471-3474

DOI:

10.4028/www.scientific.net/AMR.97-101.3471

Citation:

S. J. Liu and Y. P. Hao, "Design and Analysis of MEMS-Based Actuator", Advanced Materials Research, Vols. 97-101, pp. 3471-3474, 2010

Online since:

March 2010

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.