Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
TiN/ZrN multilayers coatings have been deposited using a reactive R. F. magnetron sputtering process. Nitride layers with different sputtering conditions have been stacked in order to obtain superlattices having different preferred orientations. The deposition rate has been considered as independent parameter which changes the energy and the momentum transfer of the backscattered particles, influencing films structure evolution.
A. Rizzo et al., "Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering ", Advances in Science and Technology, Vol. 45, pp. 1206-1211, 2006