Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering

Abstract:

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TiN/ZrN multilayers coatings have been deposited using a reactive R. F. magnetron sputtering process. Nitride layers with different sputtering conditions have been stacked in order to obtain superlattices having different preferred orientations. The deposition rate has been considered as independent parameter which changes the energy and the momentum transfer of the backscattered particles, influencing films structure evolution.

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Periodical:

Edited by:

P. VINCENZINI

Pages:

1206-1211

DOI:

10.4028/www.scientific.net/AST.45.1206

Citation:

A. Rizzo et al., "Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering ", Advances in Science and Technology, Vol. 45, pp. 1206-1211, 2006

Online since:

October 2006

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$35.00

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