New Magnetron Sputtered Stainless Steel Nitride Cermet Solar Absorbing Coatings
This paper presents a new method for sputtering solar selective absorber coatings. Radio frequency magnetron reactive sputtering created stainless steel/stainless steel nitride (SS/SS-N) cermet (ceramic-metal composite) thin films under varied nitrogen gas flow ratios. In this present study, a stainless steel material is used for one-target sputtering to manufacture a solar selective absorber film having good solar absorptance of 0.91 and low thermal emittance of 0.06. This sputtering process shows considerable and stable usefulness due to the anti-oxidation and single target. Optical constants n and k have been determined by spectroscopic ellipsometry for cermet composite in a reactive gas flow from 0 percent to 50 percent. Based on the nitrogen content of the film, we used a different oscillator to analyze the film. When the nitrogen gas flow reaches 10 percent, the sputtered film has a significant transformation from metal to cermet properties. When the nitrogen gas flow goes above 17.5 percent, then the film transforms to a dielectric film which can be an anti-reflection layer. A solar absorptance of 0.92 was accepted as the theoretical prediction of optimal selective solar-absorbing three-layer processes which shows that the experimental results agree well with the theoretical prediction.
Pietro VINCENZINI and Giancarlo RIGHINI
R. C. Juang et al., "New Magnetron Sputtered Stainless Steel Nitride Cermet Solar Absorbing Coatings", Advances in Science and Technology, Vol. 55, pp. 181-186, 2008