Crystal-originated particles on Czochralski wafer surfaces, as revealed by light-scattering tools, were investigated by means of high-resolution transmission electron microscopy using specimens that had been prepared by using a focussed ion-beam tool. Structural imaging of buried defects furnished direct evidence of the void-like nature of the defects which led to the formation of crystal-originated particles.

H.Bender, J.Vanhellemont, R.Schmolke: Japanese Journal of Applied Physics - 2, 1997, 36[9A-B], L1217-20