Second harmonic microscopy was used to study In diffusion on (111) surfaces. It was found that, for homologous temperatures that were near to 0.5 and coverages ranging from 0 to 0.7, the In diffusivity (table 4) could be described by:
D (cm2/s) = 3000 exp[-42(kcal/mol)/RT]
The values of the Arrhenius parameters, which were quite large, were explained semi-quantitatively in terms of an adatom-vacancy model which had been developed for similar systems. The present work offered considerable evidence for the effects of adatom-vacancy ionization.
C.E.Allen, R.Ditchfield, E.G.Seebauer: Journal of Vacuum Science and Technology A, 1996, 14[1], 22-9
Table 4
Diffusivity of In on the (111) Surface of Si
Temperature (C) | D (cm2/s) |
595 | 9.1 x 10-8 |
580 | 6.0 x 10-8 |
560 | 2.8 x 10-8 |
540 | 1.1 x 10-8 |
520 | 6.0 x 10-9 |
505 | 4.0 x 10-9 |
480 | 1.7 x 10-9 |
465 | 9.6 x 10-10 |