Surface defects and local strains in polished material were characterized by using cross-sectional transmission electron microscopic and convergent-beam electron diffraction techniques. Dislocations were introduced from the surface by polishing with diamond slurry, and the main slip system was found to be ½<101>{111}. The depth of the dislocation-introduced zone increased with increasing diamond particle size. On the other hand, the dislocation density was fairly high for materials which had been polished with small particles. This was because the stress between the particle and the surface increased with increasing particle size, and the particle density increased with decreasing particle size. Local strains persisted to a depth of 1 to 1.5 below the surface in samples which had been polished with 0.5 to 6 diamond slurry. This residual stress was located at about 1 below the dislocation-introduced zone.

T.Saito, Y.Doke, Y.Sakaida, Y.Ikuhara: Japanese Journal of Applied Physics 1, 1995, 34[6A], 3198-203