Various elements were diffused into a superlattice structure at temperatures of between 700 and 1000C. Their disordering effect upon the superlattice was assessed by using a small-angle polishing method. The diffusion of Au had no disordering effect upon the superlattice. The results were explained in terms of the interstitial-substitutional mechanism, and of the solubility of the given dopant in GaAs.

H.P.Ho, I.Harrison, N.Baba-Ali, B.Tuck, M.Henini: Journal of Electronic Materials, 1991, 20[9], 649-52