Cation self-diffusion in superlattices was examined in terms of the activation enthalpy. It was suggested that cation diffusion should be mediated by As-antisite point defects, via the use of (As)antisite-rich materials or As-rich diffusion sources. It was also proposed that (As)antisite-mediated cation diffusion should exhibit a characteristic activation enthalpy of about 2.5eV under extrinsic conditions. Published data on interdiffusion in superlattices revealed a Fermi level dependence of the activation enthalpy. On this basis, it was concluded that the As-antisite defect was responsible for p-type impurity-enhanced cation self-diffusion.

H.Iguchi: Japanese Journal of Applied Physics, 1989, 28[12], L2115-8