The migration of Al and Ga in Ga0.6Al0.4As/GaAs quantum wells was investigated by measuring the photoluminescence of samples which had been annealed at temperatures ranging from 850 to 1065C; with and without a SiO2 cap. At 1000C, under a SiO2 cap, the Al-Ga interdiffusion coefficient was at least 2 orders of magnitude higher for a GaAlAs/GaAs quantum well than for an InAlGaP/GaInP quantum well, within the same sample. By comparing the calculated photoluminescence shifts with measured values, an activation energy of 4.5eV was estimated (table 6) for Al-Ga interdiffusion in a GaAlAs/GaAs quantum well under a SiO2 cap.
K.J.Beernink, D.Sun, D.W.Treat, B.P.Bour: Applied Physics Letters, 1995, 66[26], 3597-9
Table 6
Interdiffusivity (Al-Ga) in GaAlAs/GaAs
Conditions | Temperature (C) | D (cm2/s) |
RTA/SiO2 | 1065 | 2.5 x 10-15 |
RTA/SiO2 | 1025 | 1.8 x 10-15 |
RTA/SiO2 | 1000 | 4.3 x 10-16 |
no SiO2 | 1000 | 4.1 x 10-17 |
RTA/SiO2 | 975 | 1.8 x 10-16 |
FA/SiO2 | 925 | 3.0 x 10-17 |
FA/SiO2 | 900 | 2.3 x 10-17 |
FA/SiO2 | 870 | 4.7 x 10-18 |
FA/SiO2 | 845 | 1.6 x 10-18 |