It was noted that the formation of dislocations and precipitates in monocrystalline substrates occurred when elemental gas sources with a sufficiently high Zn partial pressure were used to diffuse Zn into the surface regions of the substrate. A study of the nature of these defects at various depths in the Zn concentration profiles permitted conclusions to be drawn concerning defect formation and evolution during diffusion, and revealed valuable information concerning the point defects which were involved in Zn diffusion.

A.Rucki, W.Jäger: Defect and Diffusion Forum, 1997, 143-147, 1095-100