A review was presented of developments in the understanding of self-diffusion and impurity diffusion processes in this material; with particular emphasis being placed on the inclusion of recent Ga-isotope diffusion data. Specific diffusion mechanisms were suggested for C, P, Sb and S; which were all substitutionally dissolved on the As sub-lattice.

U.Gösele, T.Y.Tan, M.Schultz, U.Egger, P.Werner, R.Scholz, O.Breitenstein: Defect and Diffusion Forum, 1997, 143-147, 1079-94