Paper eintragenA closed-ampoule technique was used to study the simultaneous diffusion of Cd and Zn into material which was lattice-matched to InP. It was found that the Cd atoms, whose interstitial diffusion coefficient was small when compared with that of Zn interstitials, penetrated into the crystal as deeply as the Zn atoms. These data agreed with the results of numerical simulations of simultaneous diffusion, in III-V compounds, which were based upon an interstitial-substitutional diffusion mechanism.

U.Wielsch, P.Ambrée, B.Gruska: Semiconductor Science and Technology, 1990, 5[9], 923-7